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Epitaxial growth of wafer-scale two-dimensional polytypic ZnS thin films on ZnO substrates

机译:在ZnO衬底上外延生长晶片级二维多型Zns薄膜

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摘要

In this paper, we report the first successful epitaxial synthesis of flat wafer-scale two-dimensional ZnS thin films on singlecrystalline ZnO substrates with high reproducibility, stability, and reliability, despite the large lattice mismatch (approximately 20%) between ZnO and ZnS. The as-grown ZnS was composed of two crystal phases: wurtzite (WZ) and zinc blende (ZB). The epitaxial orientation between the different phases was identified as: [2−1−10] ZnO//[2−1−10] ZnS//[10−1] ZnS and (0001) ZnO// (0001) ZnS//(111) ZnS. The crystal structure and the strain profile at the interfaces were studied in detail. After a simple etching treatment, exfoliated large-area free-standing ZnS thin films were achieved for the first time. The present product is expected to become valuable to the strategy of growing large-area thin films or heterostructures with a large lattice mismatch.
机译:在本文中,尽管ZnO和ZnS之间存在较大的晶格失配(约20%),但我们首次成功地在单晶ZnO衬底上成功地外延合成了扁平晶片级二维ZnS薄膜,该薄膜具有高再现性,稳定性和可靠性。生长中的ZnS由两个晶相组成:纤锌矿(WZ)和锌共混物(ZB)。不同相之间的外延取向被确定为:[2-1-1] ZnO // [2-1-1] ZnS // [10-1] ZnS和(0001)ZnO //(0001)ZnS // (111)硫化锌。详细研究了界面处的晶体结构和应变曲线。经过简单的蚀刻处理后,第一次获得了剥落的大面积自支撑ZnS薄膜。预期本产品对于生长具有大晶格失配的大面积薄膜或异质结构的策略将有价值。

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